The use of sputtered ZnO piezoelectric thin films as broad-band microactuators

DFL Jenkins, MJ Cunningham, G Velu, D Remiens

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	135-139
Number of pages	0
Journal	SENSORS AND ACTUATORS A-PHYSICAL
Volume	63
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(97)01520-3
Publication status	Published - 1997

Keywords

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title = "The use of sputtered ZnO piezoelectric thin films as broad-band microactuators",

keywords = "microactuators, piezoelectric thin films, zinc oxide",

author = "DFL Jenkins and MJ Cunningham and G Velu and D Remiens",

year = "1997",

doi = "10.1016/S0924-4247(97)01520-3",

language = "English",

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pages = "135--139",

journal = "SENSORS AND ACTUATORS A-PHYSICAL",

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T1 - The use of sputtered ZnO piezoelectric thin films as broad-band microactuators

AU - Jenkins, DFL

AU - Cunningham, MJ

AU - Velu, G

AU - Remiens, D

PY - 1997

Y1 - 1997

KW - microactuators

KW - piezoelectric thin films

KW - zinc oxide

U2 - 10.1016/S0924-4247(97)01520-3

DO - 10.1016/S0924-4247(97)01520-3

M3 - Article

SN - 0924-4247

VL - 63

SP - 135

EP - 139

JO - SENSORS AND ACTUATORS A-PHYSICAL

JF - SENSORS AND ACTUATORS A-PHYSICAL

IS - 2

ER -