The use of composite piezoelectric thick films for actuation and control of miniature cantilevers

DFL Jenkins, MJ Cunningham, WW Clegg

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Original language	English
Pages (from-to)	71-74
Number of pages	0
Journal	Microelectronic Engineering
Volume	29
Issue number	0
DOIs	https://doi.org/10.1016/0167-9317(95)00117-4
Publication status	Published - 1995

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title = "The use of composite piezoelectric thick films for actuation and control of miniature cantilevers",

author = "DFL Jenkins and MJ Cunningham and WW Clegg",

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T1 - The use of composite piezoelectric thick films for actuation and control of miniature cantilevers

AU - Jenkins, DFL

AU - Cunningham, MJ

AU - Clegg, WW

PY - 1995

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U2 - 10.1016/0167-9317(95)00117-4

DO - 10.1016/0167-9317(95)00117-4

M3 - Conference proceedings published in a journal

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EP - 74

JO - Microelectronic Engineering

JF - Microelectronic Engineering

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