| Original language | English |
|---|---|
| Pages (from-to) | 173-177 |
| Number of pages | 0 |
| Journal | SENSORS AND ACTUATORS A-PHYSICAL |
| Volume | 58 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1997 |
Keywords
- micromechanical actuators
- piezoceramics
- polymers
- thick films
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver