The preparation of piezoceramic-polymer thick films and their application as micromechanical actuators

WW Clegg, DFL Jenkins, MJ Cunningham

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)173-177
Number of pages0
JournalSENSORS AND ACTUATORS A-PHYSICAL
Volume58
Issue number3
DOIs
Publication statusPublished - 1997

Keywords

  • micromechanical actuators
  • piezoceramics
  • polymers
  • thick films

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