The characterisation of PZT films of differing orientations for MEMS applications

DFL Jenkins, WW Clegg, G Velu, E Cattan, D Remiens

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Keywords

@article{2ec20b1f773641c984a0c13ca2d1c4d5,

title = "The characterisation of PZT films of differing orientations for MEMS applications",

keywords = "piezoelectric thin films, MEMS, micro-actuators",

author = "DFL Jenkins and WW Clegg and G Velu and E Cattan and D Remiens",

year = "1999",

language = "English",

volume = "224",

pages = "687--694",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "0",

}

TY - JOUR

T1 - The characterisation of PZT films of differing orientations for MEMS applications

AU - Jenkins, DFL

AU - Clegg, WW

AU - Velu, G

AU - Cattan, E

AU - Remiens, D

PY - 1999

Y1 - 1999

KW - piezoelectric thin films

KW - MEMS

KW - micro-actuators

M3 - Conference proceedings published in a journal

SN - 0015-0193

VL - 224

SP - 687

EP - 694

JO - Ferroelectrics

JF - Ferroelectrics

IS - 0

ER -