Shielding technique for deposition of Au electrical contacts on graphene by sputtering

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Original language	English
Number of pages	0
Journal	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume	33
Issue number	3
DOIs	https://doi.org/10.1116/1.4916589
Publication status	Published - 31 Mar 2015

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@article{797c97610bdc47208a55a3688d081830,

title = "Shielding technique for deposition of Au electrical contacts on graphene by sputtering",

author = "Bing Li and Genhua Pan and Jamil, \{Nawfal Y.\} and Al, \{Taan L\} and Shakil Awan and Neil Avent",

year = "2015",

month = mar,

day = "31",

doi = "10.1116/1.4916589",

language = "English",

volume = "33",

journal = "JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A",

issn = "0734-2101",

number = "3",

}

TY - JOUR

T1 - Shielding technique for deposition of Au electrical contacts on graphene by sputtering

AU - Li, Bing

AU - Pan, Genhua

AU - Jamil, Nawfal Y.

AU - Al, Taan L

AU - Awan, Shakil

AU - Avent, Neil

PY - 2015/3/31

Y1 - 2015/3/31

UR - https://pearl.plymouth.ac.uk/secam-research/680/

U2 - 10.1116/1.4916589

DO - 10.1116/1.4916589

M3 - Article

SN - 0734-2101

VL - 33

JO - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

JF - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

IS - 3

ER -