Shielding technique for deposition of Au electrical contacts on graphene by sputtering

Bing Li, Genhua Pan, Nawfal Y. Jamil, Taan L Al, Shakil Awan, Neil Avent

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Original language	English
Number of pages	0
Journal	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume	33
Issue number	3
DOIs	https://doi.org/10.1116/1.4916589
Publication status	Published - 31 Mar 2015

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title = "Shielding technique for deposition of Au electrical contacts on graphene by sputtering",

author = "Bing Li and Genhua Pan and Jamil, {Nawfal Y.} and Al, {Taan L} and Shakil Awan and Neil Avent",

year = "2015",

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language = "English",

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journal = "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A",

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TY - JOUR

T1 - Shielding technique for deposition of Au electrical contacts on graphene by sputtering

AU - Li, Bing

AU - Pan, Genhua

AU - Jamil, Nawfal Y.

AU - Al, Taan L

AU - Awan, Shakil

AU - Avent, Neil

PY - 2015/3/31

Y1 - 2015/3/31

U2 - 10.1116/1.4916589

DO - 10.1116/1.4916589

M3 - Article

SN - 0734-2101

VL - 33

JO - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

JF - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

IS - 3

ER -