Shielding technique for deposition of Au electrical contacts on graphene by sputtering

Bing Li, Genhua Pan, Nawfal Y. Jamil, Taan L Al, Shakil Awan, Neil Avent

Research output: Contribution to journalArticlepeer-review

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Original languageEnglish
Number of pages0
JournalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume33
Issue number3
DOIs
Publication statusPublished - 31 Mar 2015

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