Reactive sputtering of high moment Fe-N soft magnetic films with in-situ plasma diagnosis & control

G Pan, L Wang, R Buckley, A Petford-Long

Research output: Contribution to conference › Conference paper (not formally published) › peer-review

Original language	English
Publication status	In preparation - 1 Jan 2001
Event	8th joint MMM-Intermag - Duration: 1 Jan 2001 → …

Conference	8th joint MMM-Intermag
Period	1/01/01 → …

Cite this

@conference{873e65e4cc534ea881d0ac0972cbf3ce,

title = "Reactive sputtering of high moment Fe-N soft magnetic films with in-situ plasma diagnosis \& control",

author = "G Pan and L Wang and R Buckley and A Petford-Long",

year = "2001",

month = jan,

day = "1",

language = "English",

note = "8th joint MMM-Intermag ; Conference date: 01-01-2001",

}