Reactive sputtering of high moment Fe-N soft magnetic films with in-situ plasma diagnosis & control

G Pan, L Wang, R Buckley, A Petford-Long

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	0
Journal	Default journal
Volume	0
Issue number	0
Publication status	Published - 2001
Event	8th joint MMM-Intermag - Duration: 1 Jan 2001 → …

Cite this

@article{c3a3bb6e7df54173ab45336144e66272,

title = "Reactive sputtering of high moment Fe-N soft magnetic films with in-situ plasma diagnosis & control",

author = "G Pan and L Wang and R Buckley and A Petford-Long",

year = "2001",

language = "English",

volume = "0",

journal = "Default journal",

number = "0",

note = "8th joint MMM-Intermag ; Conference date: 01-01-2001",

}