PZT thin film bi-layer devices for improved actuation in MEMS

D Jenkins, WW Clegg, E Cattan, D Remiens

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Proceedings 12th IEEE Int Symp on Applications of Ferroelectrics
Editors	Streiffer Streiffer, Gibbons , Tsurumi
Number of pages	0
Volume	0
Publication status	Published - 1 Jan 2001

Cite this

@inbook{053cf65df2db43a2a14ffdb4a4109173,

title = "PZT thin film bi-layer devices for improved actuation in MEMS",

author = "D Jenkins and WW Clegg and E Cattan and D Remiens",

year = "2001",

month = jan,

day = "1",

language = "English",

volume = "0",

editor = "Streiffer Streiffer and Gibbons and Tsurumi",

booktitle = "Proceedings 12th IEEE Int Symp on Applications of Ferroelectrics",

}