PZT thin film bi-layer devices for controlled actuation in MEMS

D Jenkins, WW Clegg, E Cattan, D Remiens

Research output: Contribution to journal › Article › peer-review

Cite this

@article{635eb99368154db6abb5e589a824a1ff,

title = "PZT thin film bi-layer devices for controlled actuation in MEMS",

author = "D Jenkins and WW Clegg and E Cattan and D Remiens",

year = "2001",

month = oct,

day = "1",

language = "English",

volume = "7",

pages = "5--12",

journal = "Journal of Electroceramics",

issn = "1385-3449",

publisher = "Springer Netherlands",

number = "1",

}