Piezoelectric thin films for MEMS applications-A comparative study of PZT, 0.7PMN-0.3PT and 0.9PMN-0.1PT thin films grown on Si by r.f. magnetron sputtering

R Herdier, M Detalle, D Jenkins, C Soyer, D Remiens

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)122-128
Number of pages0
JournalSENSORS AND ACTUATORS A-PHYSICAL
Volume148
Issue number1
DOIs
Publication statusPublished - 2008

Keywords

  • Piezoelectric properties
  • PMN-PT
  • PZT
  • Ferroelectricity
  • Thin films

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