Optimized design and process for making a DC voltage reference based on MEMS.

^*Corresponding author for this work

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@article{081c6afdf5c54e9ab531f8a3c4eb5119,

title = "Optimized design and process for making a DC voltage reference based on MEMS.",

author = "Anu K{\"a}rkk{\"a}inen and Awan, \{Shakil A.\} and Jukka Kyyn{\"a}r{\"a}inen and Panu Pekko and Oja, \{Aarne S.\} and Heikki Sepp{\"a}",

year = "2005",

doi = "10.1109/TIM.2004.843097",

language = "English",

volume = "54",

pages = "563--566",

journal = "IEEE Trans. Instrum. Meas.",

number = "0",

}

TY - JOUR

T1 - Optimized design and process for making a DC voltage reference based on MEMS.

AU - Kärkkäinen, Anu

AU - Awan, Shakil A.

AU - Kyynäräinen, Jukka

AU - Pekko, Panu

AU - Oja, Aarne S.

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

U2 - 10.1109/TIM.2004.843097

DO - 10.1109/TIM.2004.843097

M3 - Article

VL - 54

SP - 563

EP - 566

JO - IEEE Trans. Instrum. Meas.

JF - IEEE Trans. Instrum. Meas.

IS - 0

ER -