Optimized design and process for making a DC voltage reference based on MEMS.

Anu Kärkkäinen*, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja, Heikki Seppä

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)563-566
Number of pages0
JournalIEEE Trans. Instrum. Meas.
Volume54
Issue number0
DOIs
Publication statusPublished - 2005

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