Original language | English |
---|---|
Pages (from-to) | 563-566 |
Number of pages | 0 |
Journal | IEEE Trans. Instrum. Meas. |
Volume | 54 |
Issue number | 0 |
DOIs | |
Publication status | Published - 2005 |
Optimized design and process for making a DC voltage reference based on MEMS.
Anu Kärkkäinen*, Shakil A. Awan, Jukka Kyynäräinen, Panu Pekko, Aarne S. Oja, Heikki Seppä
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review