Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates: A comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

M Pokorny; M Sulc; R Herdier; D Remiens; E Dogheche; D Jenkins

Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates: A comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

M Pokorny, M Sulc, R Herdier, D Remiens, E Dogheche, D Jenkins

School of Engineering, Computing and Mathematics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	122-130
Number of pages	8
Journal	Ferroelectrics
Volume	351
Issue number	0
Publication status	Published - 1 Jan 2007

Cite this

@article{b03190d1fc194dd7ac44ac5f96020583,

title = "Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates: A comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques",

author = "M Pokorny and M Sulc and R Herdier and D Remiens and E Dogheche and D Jenkins",

year = "2007",

month = jan,

day = "1",

language = "English",

volume = "351",

pages = "122--130",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "0",

}

TY - JOUR

T1 - Measurement methods for the d(33) coefficient of PZT thin films on silicon substrates: A comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

AU - Pokorny, M

AU - Sulc, M

AU - Herdier, R

AU - Remiens, D

AU - Dogheche, E

AU - Jenkins, D

PY - 2007/1/1

Y1 - 2007/1/1

M3 - Article

SN - 0015-0193

VL - 351

SP - 122

EP - 130

JO - Ferroelectrics

JF - Ferroelectrics

IS - 0

ER -