Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.

DFL Jenkins, D Remiens, C Soyer, D Troadec, R Yuang, G Wang, X Dong

Research output: Contribution to journal › Article › peer-review

Cite this

@article{bd44eb8f03cb40eb84f24aa555fa5b06,

title = "Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.",

author = "DFL Jenkins and D Remiens and C Soyer and D Troadec and R Yuang and G Wang and X Dong",

year = "2010",

language = "English",

volume = "2",

pages = "214--225",

journal = "J. of Micro and Nanosystems",

number = "3",

}