Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.

D Remiens, C Soyer, D Troadec, D Deresmes, D Jenkins, R Liang, G Wang, X Dong, Costa A Da, R Desfeux

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@article{e3324bbfd28d4316b1a335841ff9d993,

title = "Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.",

author = "D Remiens and C Soyer and D Troadec and D Deresmes and D Jenkins and R Liang and G Wang and X Dong and Da, \{Costa A\} and R Desfeux",

year = "2009",

month = feb,

day = "1",

doi = "10.2174/1876402910901030214",

language = "English",

volume = "1",

pages = "214--225",

journal = "Micro and Nanosystems",

issn = "1876-4029",

publisher = "Bentham Science Publishers",

number = "3",

}

TY - JOUR

T1 - Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.

AU - Remiens, D

AU - Soyer, C

AU - Troadec, D

AU - Deresmes, D

AU - Jenkins, D

AU - Liang, R

AU - Wang, G

AU - Dong, X

AU - Da, Costa A

AU - Desfeux, R

PY - 2009/2/1

Y1 - 2009/2/1

U2 - 10.2174/1876402910901030214

DO - 10.2174/1876402910901030214

M3 - Article

SN - 1876-4029

VL - 1

SP - 214

EP - 225

JO - Micro and Nanosystems

JF - Micro and Nanosystems

IS - 3

ER -