High resolution micro-positioning of a silicon cantilever using sputtered PZT films.

DFL Jenkins, MJ Cunningham, G Velu, D Remiens

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Keywords

@article{67814a0cbb194385932804cf99788ff1,

title = "High resolution micro-positioning of a silicon cantilever using sputtered PZT films.",

keywords = "Ferroelectric thin films, micro-positioners, active vibration control",

author = "DFL Jenkins and MJ Cunningham and G Velu and D Remiens",

year = "1997",

doi = "10.1080/10584589708013005",

language = "English",

volume = "17",

pages = "309--318",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "0",

}

TY - JOUR

T1 - High resolution micro-positioning of a silicon cantilever using sputtered PZT films.

AU - Jenkins, DFL

AU - Cunningham, MJ

AU - Velu, G

AU - Remiens, D

PY - 1997

Y1 - 1997

KW - Ferroelectric thin films

KW - micro-positioners

KW - active vibration control

U2 - 10.1080/10584589708013005

DO - 10.1080/10584589708013005

M3 - Conference proceedings published in a journal

SN - 1058-4587

VL - 17

SP - 309

EP - 318

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 0

ER -