HDI-09 A POLARISATION INTERFEROMETER FOR FLYING HEIGHT MEASUREMENT DOWN TO NEAR-CONTACT

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	50-51
Journal	Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Volume	2003
DOIs	https://doi.org/10.1299/jsmemipe.2003.50
Publication status	Published - 2003

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@article{339a6c4967e64760bcae5a37388719a2,

title = "HDI-09 A POLARISATION INTERFEROMETER FOR FLYING HEIGHT MEASUREMENT DOWN TO NEAR-CONTACT",

author = "DFL JENKINS and X LIU and WW CLEGG",

year = "2003",

doi = "10.1299/jsmemipe.2003.50",

language = "English",

volume = "2003",

pages = "50--51",

journal = "Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE",

issn = "2424-3132",

}

TY - JOUR

T1 - HDI-09 A POLARISATION INTERFEROMETER FOR FLYING HEIGHT MEASUREMENT DOWN TO NEAR-CONTACT

AU - JENKINS, DFL

AU - LIU, X

AU - CLEGG, WW

PY - 2003

Y1 - 2003

U2 - 10.1299/jsmemipe.2003.50

DO - 10.1299/jsmemipe.2003.50

M3 - Article

SN - 2424-3132

VL - 2003

SP - 50

EP - 51

JO - Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

JF - Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE

ER -