Abstract
A laser scanning system has been developed with two-axis galvanometer mirrors and full objective aperture illumination, enabling a focused spot to be rapidly scanned across the surface of the stationary sample under investigation. Present specification allows scan fields of up to 5 mm × 5 mm to be studied with a spot size of 30 μm; direct trade-off is possible between scan area and spatial resolution. Using the scanning system, a microscope with photo-acoustic detection has been developed. Examples are given of the detection of well-defined surface and sub-surface variations using amplitude and phase information respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 263-266 |
| Number of pages | 0 |
| Journal | Engineering optics |
| Volume | 6 |
| Issue number | 3 |
| Publication status | Published - 1 Aug 1993 |