Characterisation of MEMS devices using a polarisation interferometer

Research output: Contribution to journal › Article › peer-review

Cite this

@article{04ddfe0627e64d6b889d6776e426da86,

title = "Characterisation of MEMS devices using a polarisation interferometer",

author = "D Jenkins and W Clegg and XQ Liu and E Fribourg-Blanc and E Cattan and D Remiens",

year = "2002",

month = jan,

day = "1",

language = "English",

volume = "50",

pages = "91--99",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "0",

}