| Original language | English |
|---|---|
| Pages (from-to) | 125-128 |
| Number of pages | 0 |
| Journal | SENSORS AND ACTUATORS A-PHYSICAL |
| Volume | 63 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1997 |
Keywords
- electrostatic actuation
- magnetic force microscopy
- vibration control