Active vibration control and actuation of a small cantilever for applications in scanning probe instruments

MJ Cunningham, DFL Jenkins, WW Clegg, MM Bakush

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)147-150
Number of pages0
JournalSENSORS AND ACTUATORS A-PHYSICAL
Volume50
Issue number0
DOIs
Publication statusPublished - 1995

Keywords

  • actuation
  • cantilevers
  • scanning probe instruments
  • vibration control

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