@article{67c744158279471b82f94976d9e00578,
title = "Active vibration control and actuation of a small cantilever for applications in scanning probe instruments",
keywords = "actuation, cantilevers, scanning probe instruments, vibration control",
author = "MJ Cunningham and DFL Jenkins and WW Clegg and MM Bakush",
year = "1995",
doi = "10.1016/0924-4247(96)80099-9",
language = "English",
volume = "50",
pages = "147--150",
journal = "SENSORS AND ACTUATORS A-PHYSICAL",
issn = "0924-4247",
number = "0",
}