A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films

A silicon cantilever beam structure for the evaluation of d₃₁, d₃₃ and e₃₁ piezoelectric coefficients of PZT thin films

R Herdier, D Jenkins, D Remiens, M Dupont, D Osmont

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings published in a book › peer-review

Original language	English
Title of host publication	Host publication not specified in Elements
Pages	722-+
Number of pages	0
Volume	0
Publication status	Published - 2007

@inproceedings{733cfe198b90403aa8f959b604b2ff72,

title = "A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films",

author = "R Herdier and D Jenkins and D Remiens and M Dupont and D Osmont",

year = "2007",

language = "English",

isbn = "9781424413331",

volume = "0",

pages = "722--+",

booktitle = "Host publication not specified in Elements",

}

TY - GEN

T1 - A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films

AU - Herdier, R

AU - Jenkins, D

AU - Remiens, D

AU - Dupont, M

AU - Osmont, D

PY - 2007

Y1 - 2007

M3 - Conference proceedings published in a book

SN - 9781424413331

VL - 0

SP - 722-+

BT - Host publication not specified in Elements

ER -