A silicon cantilever beam structure for the evaluation of d<inf>31</inf>, d<inf>33</inf> and e<inf>31</inf> piezoelectric coefficients of PZT thin films

R Herdier, D Jenkins, D Remiens, M Dupont, D Osmont

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Original language	English
Number of pages	0
Journal	2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
Volume	0
Issue number	0
DOIs	https://doi.org/10.1109/isaf.2007.4393383
Publication status	Published - May 2007
Event	2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Duration: 27 May 2007 → 31 May 2007

Access to Document

@article{9ed2818c879b4e48bb5ddd9bc98416f0,

title = "A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films",

author = "R Herdier and D Jenkins and D Remiens and M Dupont and D Osmont",

year = "2007",

month = may,

doi = "10.1109/isaf.2007.4393383",

language = "English",

volume = "0",

journal = "2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics",

issn = "1099-4734",

number = "0",

note = "2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics ; Conference date: 27-05-2007 Through 31-05-2007",

}

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

TY - JOUR

T1 - A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films

AU - Herdier, R

AU - Jenkins, D

AU - Remiens, D

AU - Dupont, M

AU - Osmont, D

PY - 2007/5

Y1 - 2007/5

U2 - 10.1109/isaf.2007.4393383

DO - 10.1109/isaf.2007.4393383

M3 - Conference proceedings published in a journal

SN - 1099-4734

VL - 0

JO - 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

JF - 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

IS - 0

T2 - 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

Y2 - 27 May 2007 through 31 May 2007

ER -