Original language | English |
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Number of pages | 0 |
Journal | 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics |
Volume | 0 |
Issue number | 0 |
DOIs | |
Publication status | Published - May 2007 |
Event | 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics - Duration: 27 May 2007 → 31 May 2007 |
A silicon cantilever beam structure for the evaluation of d<inf>31</inf>, d<inf>33</inf> and e<inf>31</inf> piezoelectric coefficients of PZT thin films
R Herdier, D Jenkins, D Remiens, M Dupont, D Osmont
Research output: Contribution to journal › Conference proceedings published in a journal › peer-review