A silicon cantilever beam structure for the evaluation of d<inf>31</inf>, d<inf>33</inf> and e<inf>31</inf> piezoelectric coefficients of PZT thin films

R Herdier, D Jenkins, D Remiens, M Dupont, D Osmont

Research output: Contribution to journalConference proceedings published in a journalpeer-review

Original languageEnglish
Number of pages0
Journal2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
Volume0
Issue number0
DOIs
Publication statusPublished - May 2007
Event2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics -
Duration: 27 May 200731 May 2007

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