Original language | English |
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Pages (from-to) | 725-727 |
Number of pages | 0 |
Journal | Proc. 16th IEEE International Symposium on Applications of Ferroelectrics |
Volume | 0 |
Issue number | 0 |
Publication status | Published - 2007 |
A MEMS type cantilever structure for the evaluation of d31, d33 and e31 piezoelectric coefficient.
DFL Jenkins, R Herdier, D Remiens
Research output: Contribution to journal › Article › peer-review