A MEMS type cantilever structure for the evaluation of d31, d33 and e31 piezoelectric coefficient.

DFL Jenkins, R Herdier, D Remiens

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)725-727
Number of pages0
JournalProc. 16th IEEE International Symposium on Applications of Ferroelectrics
Volume0
Issue number0
Publication statusPublished - 2007

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