A combined polarising interferometer and optical beam deflection system for MEMS characterisation

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Original language	English
Pages (from-to)	15-25
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Publication status	Published - 1 Jan 2001

Cite this

@article{8e4ada5db02b41e09789d0bc4024ef42,

title = "A combined polarising interferometer and optical beam deflection system for MEMS characterisation",

author = "DFL Jenkins and WW Clegg and X Liu and G Tunstall and E Cattan and D Remiens and B Liu",

year = "2001",

month = jan,

day = "1",

language = "English",

pages = "15--25",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - A combined polarising interferometer and optical beam deflection system for MEMS characterisation

AU - Jenkins, DFL

AU - Clegg, WW

AU - Liu, X

AU - Tunstall, G

AU - Cattan, E

AU - Remiens, D

AU - Liu, B

PY - 2001/1/1

Y1 - 2001/1/1

M3 - Conference proceedings published in a journal

SN - 0277-786X

SP - 15

EP - 25

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -