A combined polarising interferometer and optical beam deflection system for MEMS characterisation

DFL Jenkins, WW Clegg, X Liu, G Tunstall, E Cattan, D Remiens, B Liu

Research output: Contribution to journal › Conference proceedings published in a journal › peer-review

Cite this

@article{8e4ada5db02b41e09789d0bc4024ef42,

title = "A combined polarising interferometer and optical beam deflection system for MEMS characterisation",

author = "DFL Jenkins and WW Clegg and X Liu and G Tunstall and E Cattan and D Remiens and B Liu",

year = "2001",

month = jan,

day = "1",

language = "English",

volume = "0",

pages = "15--25",

journal = "Default journal",

issn = "0277-786X",

number = "0",

}

TY - JOUR

T1 - A combined polarising interferometer and optical beam deflection system for MEMS characterisation

AU - Jenkins, DFL

AU - Clegg, WW

AU - Liu, X

AU - Tunstall, G

AU - Cattan, E

AU - Remiens, D

AU - Liu, B

PY - 2001/1/1

Y1 - 2001/1/1

M3 - Conference proceedings published in a journal

SN - 0277-786X

VL - 0

SP - 15

EP - 25

JO - Default journal

JF - Default journal

IS - 0

ER -